Patent Assignment
Reel/Frame 042378/0784
Assignment of Assignor's Interest
Recorded: 2017-05-15
Pages: 7
Assignors
ANDRE, STEPHAN
Executed: 2017-05-01
GOLDE, DANIEL
Executed: 2017-04-24
GRUNER, TORALF
Executed: 2017-04-19
RUOFF, JOHANNES
Executed: 2017-04-19
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure Method and Projection Exposure Apparatus