Patent Assignment
Reel/Frame 042381/0300
Assignment of Assignor's Interest
Recorded: 2017-05-15
Pages: 5
Assignor
YAMAZAWA, YOHEI
Executed: 2017-04-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus