Patent Assignment
Reel/Frame 042381/0379
Assignment of Assignor's Interest
Recorded: 2017-05-15
Pages: 7
Assignors
MITSUNAGA, TADASHI
Executed: 2017-04-21
MIYASHITA, TETSUYA
Executed: 2017-04-21
HATANO, TATSUO
Executed: 2017-04-21
WATANABE, NAOKI
Executed: 2017-04-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mounting Table System, Substrate Processing Apparatus, and Temperature Control Method