Patent Assignment
Reel/Frame 042385/0515
Assignment of Assignor's Interest
Recorded: 2017-05-15
Pages: 5
Assignors
COLLINS, JOSHUA
Executed: 2017-05-12
LENZ, ERIC H.
Executed: 2017-05-12
DANEK, MICHAL
Executed: 2017-05-15
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Vapor Delivery Method and Apparatus for Solid and Liquid Precursors