Patent Assignment
Reel/Frame 042436/0625
Assignment of Assignor's Interest
Recorded: 2017-05-19
Pages: 6
Assignors
SEKIGUCHI, KENJI
Executed: 2017-05-15
KANNO, ITARU
Executed: 2017-05-15
AIBARA, MEITOKU
Executed: 2017-05-16
TACHIBANA, KOUZOU
Executed: 2017-05-16
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Cleaning Method, Substrate Cleaning System and Memory Medium