Patent Assignment
Reel/Frame 042488/0862
Assignment of Assignor's Interest
Recorded: 2017-05-24
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Particle Adhesion Preventing Method