Patent Assignment
Reel/Frame 042494/0758
Assignment of Assignor's Interest
Recorded: 2017-05-24
Pages: 4
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Unit for Supplying Fluid, Apparatus and Method for Treating Substrate with the Unit