Patent Assignment
Reel/Frame 042510/0124
Assignment of Assignor's Interest
Recorded: 2017-05-25
Pages: 4
Assignors
GATINEAU, SATOKO
Executed: 2017-03-07
KIM, DAEHYEON
Executed: 2017-03-07
NOH, WONTAE
Executed: 2017-03-07
GATINEAU, JULIEN
Executed: 2017-03-08
GIRARD, JEAN-MARC
Executed: 2017-03-10
Assignee
L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Zirconium, Hafnium, Titanium Precursors and Deposition of Group 4 Containing Films Using the Same