Patent Assignment
Reel/Frame 042530/0568
Assignment of Assignor's Interest
Recorded: 2017-05-30
Pages: 7
Assignors
TSUJI, MASAYUKI
Executed: 2017-04-25
SHIMIZU, AKIHIKO
Executed: 2017-04-28
NISHIMURA, TOMOKAZU
Executed: 2017-05-08
Assignee
SUMCO CORPORATION
1-2-1, SHIBAURA, MINATO-KU, TOKYO, 105-8634, JAPAN
Covered Property
(1)
Method for Manufacturing Epitaxial Silicon Wafer and Vapor Phase Growth Device