Patent Assignment
Reel/Frame 042530/0609
Assignment of Assignor's Interest
Recorded: 2017-05-30
Pages: 3
Assignors
LINGAMPALLI, RAMKISHAN RAO
Executed: 2017-05-25
HOLLINGSWORTH, JOEL
Executed: 2017-05-27
BAKER, BRADLEY
Executed: 2017-05-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Substrate Pedestal Module Including Metallized Ceramic Tubes for Rf and Gas Delivery