Patent Assignment
Reel/Frame 042561/0627
Assignment of Assignor's Interest
Recorded: 2017-06-01
Pages: 8
Assignors
GHINOVKER, MARK
Executed: 2017-02-07
ADEL, MICHAEL
Executed: 2017-02-07
MIEHER, WALTER D.
Executed: 2017-02-10
LEVY, ADY
Executed: 2017-05-16
WACK, DAN
Executed: 2016-11-04
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus for Measuring Overlay Errors