Patent Assignment
Reel/Frame 042669/0896
Assignment of Assignor's Interest
Recorded: 2017-06-02
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Method of Performing Analysis of Pattern Defect, Imprint Apparatus, and Article Manufacturing Method