Patent Assignment
Reel/Frame 042669/0945
Assignment of Assignor's Interest
Recorded: 2017-06-02
Pages: 3
Assignor
TSUJIKAWA, TAKURO
Executed: 2017-03-07
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Method, Measurement Apparatus, Lithography Apparatus, and Method of Manufacturing Article