Patent Assignment
Reel/Frame 042671/0729
Assignment of Assignor's Interest
Recorded: 2017-06-12
Pages: 4
Assignors
PARK, JASON DAEJIN
Executed: 2017-06-07
VAN SCHRAVENDIJK, BART
Executed: 2017-06-09
LEE, HSIANG-YUN
Executed: 2017-06-07
KUMAR, PURUSHOTTAM
Executed: 2017-06-07
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Creating Airgap Seals Using Atomic Layer Deposition and High Density Plasma Chemical Vapor Deposition