Patent Assignment
Reel/Frame 042688/0593
Assignment of Assignor's Interest
Recorded: 2017-06-13
Pages: 5
Assignors
LIN, TSUNG-MIN
Executed: 2017-04-26
LI, MING-HSING
Executed: 2017-05-11
CHIEN, FANG-CHI
Executed: 2017-04-26
SHIH, CHAO-LI
Executed: 2017-04-26
CHOU, HONG-HSING
Executed: 2017-05-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Plasma Generation for Ion Implanter