Patent Assignment
Reel/Frame 042721/0813
Assignment of Assignor's Interest
Recorded: 2017-06-15
Pages: 5
Assignors
WU, KAI
Executed: 2017-05-17
HSIEH, HUNG-CHIH
Executed: 2017-05-17
CHEN, KAI-HSIUNG
Executed: 2017-05-17
KE, CHIH-MING
Executed: 2017-05-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Spectroscopic Overlay Metrology