Patent Assignment
Reel/Frame 042730/0083
Assignment of Assignor's Interest
Recorded: 2017-06-16
Pages: 4
Assignors
OGATA, NOBUHIRO
Executed: 2017-05-24
ITO, NORIHIRO
Executed: 2017-05-24
HIGASHIJIMA, JIRO
Executed: 2017-05-24
HASHIMOTO, YUSUKE
Executed: 2017-05-24
AIURA, KAZUHIRO
Executed: 2017-05-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Cleaning Substrate Processing Apparatus, and Storage Medium