Patent Assignment
Reel/Frame 042749/0565
Assignment of Assignor's Interest
Recorded: 2017-06-19
Pages: 4
Assignors
ABE, MASAHIRO
Executed: 2017-06-12
INADA, HIROICHI
Executed: 2017-06-13
AZUMA, TOHRU
Executed: 2017-06-13
NAKASHIMA, TSUNENAGA
Executed: 2017-06-14
KISHITA, NAOFUMI
Executed: 2017-06-13
KAJIWARA, HIDEKI
Executed: 2017-06-13
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method, and Storage Medium