Patent Assignment
Reel/Frame 042755/0377
Assignment of Assignor's Interest
Recorded: 2017-06-20
Pages: 3
Assignors
HONDA, MINORU
Executed: 2017-06-06
NAKANISHI, TOSHIO
Executed: 2017-05-29
IMANAKA, MASASHI
Executed: 2017-06-06
HAN, CHEONSOO
Executed: 2017-06-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Plasma Film-Forming Method and Plasma Film-Forming Apparatus