Patent Assignment
Reel/Frame 042778/0807
Assignment of Assignor's Interest
Recorded: 2017-06-22
Pages: 7
Assignors
LEE, JOON-MYOUNG
Executed: 2017-06-13
PARK, YONG-SUNG
Executed: 2017-06-13
KIM, WHAN-KYUN
Executed: 2017-06-13
OH, SE-CHUNG
Executed: 2017-06-13
JANG, YOUNG-MAN
Executed: 2017-06-13
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device Using the Same