Patent Assignment
Reel/Frame 042796/0352
Assignment of Assignor's Interest
Recorded: 2017-06-23
Pages: 6
Assignors
HATAKEYAMA, JUN
Executed: 2017-05-23
OHASHI, MASAKI
Executed: 2017-05-23
FUJIWARA, TAKAYUKI
Executed: 2017-05-23
FUKUSHIMA, MASAHIRO
Executed: 2017-05-23
HONDA, KAZUYA
Executed: 2017-05-23
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process