Patent Assignment
Reel/Frame 042800/0364
Assignment of Assignor's Interest
Recorded: 2017-06-23
Pages: 3
Assignors
CHENG, WEI CHANG
Executed: 2017-05-31
CHEN, CHENG-KUANG
Executed: 2017-06-06
LIAO, CHI-HUNG
Executed: 2017-05-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN, RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Apparatus and Methods for Exhaust Cleaning