Patent Assignment
Reel/Frame 042813/0409
Assignment of Assignor's Interest
Recorded: 2017-06-26
Pages: 2
Assignors
FISCHER, ANDREAS
Executed: 2017-06-01
LILL, THORSTEN
Executed: 2017-05-31
JANEK, RICHARD
Executed: 2017-06-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Control of Directionality in Atomic Layer Etching
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.