Patent Assignment
Reel/Frame 042823/0471
Assignment of Assignor's Interest
Recorded: 2017-06-27
Pages: 4
Assignors
MOTOMATSU, KAZUKI
Executed: 2017-06-16
KANEKO, SATOSHI
Executed: 2017-06-19
SAKAMOTO, KAZUNORI
Executed: 2017-06-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method and Recording Medium