Patent Assignment
Reel/Frame 042853/0006
Assignment of Assignor's Interest
Recorded: 2017-06-28
Pages: 3
Assignors
LI, FU-HSIEN
Executed: 2017-06-26
YU, SHENG-KANG
Executed: 2017-06-27
TUNG, CHI-FENG
Executed: 2017-06-26
SHEN, HSIANG YIN
Executed: 2017-06-26
LI, GUANCYUN
Executed: 2017-06-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
System for a Semiconductor Fabrication Facility and Method for Operating the Same