Patent Assignment
Reel/Frame 042854/0429
Assignment of Assignor's Interest
Recorded: 2017-06-28
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods for Cyclic Etching of a Patterned Layer