Patent Assignment
Reel/Frame 042875/0806
Assignment of Assignor's Interest
Recorded: 2017-06-16
Pages: 4
Assignors
TANAKA, HIROSHI
Executed: 2017-06-07
HIRAYAMA, TSUKASA
Executed: 2017-06-08
INADA, TAKAO
Executed: 2017-06-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method, and Storage Medium