Patent Assignment
Reel/Frame 042878/0468
Assignment of Assignor's Interest
Recorded: 2017-06-30
Pages: 6
Assignors
WATANABE, MASAHIRO
Executed: 2017-06-19
HANDA, TAKUYA
Executed: 2017-06-19
HOSAKA, YASUHARU
Executed: 2017-06-19
OKAZAKI, KENICHI
Executed: 2017-06-19
YAMAZAKI, SHUNPEI
Executed: 2017-06-16
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Sputtering Apparatus, Sputtering Target, and Method for Forming Semiconductor Film with the Sputtering Apparatus