Patent Assignment
Reel/Frame 042902/0854
Assignment of Assignor's Interest
Recorded: 2017-07-05
Pages: 4
Assignee
TOTO LTD.
1-1, NAKASHIMA 2-CHOME, KOKURAKITA-KU, KITAKYUSHU-SHI, FUKUOKA, 802-8601, JAPAN
Covered Property
(1)
Electrostatic Chuck and Wafer Processing Apparatus