Patent Assignment
Reel/Frame 042920/0102
Assignment of Assignor's Interest
Recorded: 2017-07-06
Pages: 3
Assignor
ISHIZAWA, SHIGERU
Executed: 2017-07-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Focus Ring Replacement Method and Plasma Processing System