Patent Assignment
Reel/Frame 042921/0981
Assignment of Assignor's Interest
Recorded: 2017-07-06
Pages: 9
Assignors
YAMADA, NORIKAZU
Executed: 2017-06-27
TACHIKAWA, TOSHIFUMI
Executed: 2017-06-27
NAGAMI, KOICHI
Executed: 2017-06-27
HAMAISHI, SATORU
Executed: 2017-06-27
ITADANI, KOJI
Executed: 2017-06-27
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
DAIHEN CORPORATION
2-1-11, TAGAWA, YODOGAWA-KU, OSAKA-SHI, OSAKA, 532-8512, JAPAN
Covered Property
(1)
Plasma Processing Method