Patent Assignment
Reel/Frame 042924/0714
Assignment of Assignor's Interest
Recorded: 2017-07-06
Pages: 8
Assignors
ITO, SHINYA
Executed: 2017-05-11
SANDA, HIROSHI
Executed: 2017-05-11
NAGUMO, EIICHI
Executed: 2017-05-22
SAITO, MAKOTO
Executed: 2017-05-11
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, 105-8001, JAPAN
Covered Property
(1)
Electrostatic Chuck and Semiconductor Manufacturing Apparatus