Patent Assignment
Reel/Frame 042927/0048
Assignment of Assignor's Interest
Recorded: 2017-07-06
Pages: 8
Assignors
KOLCHIN, PAVEL
Executed: 2013-11-05
WALLINGFORD, RICHARD
Executed: 2013-10-31
GAO, LISHENG
Executed: 2013-11-07
CHEN, GRACE H.
Executed: 2013-11-06
HUBER, MARKUS B.
Executed: 2013-11-07
DANEN, ROBERT M.
Executed: 2013-11-06
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Methods for Finding a Best Aperture and Mode to Enhance Defect Detection