Patent Assignment
Reel/Frame 042935/0919
Assignment of Assignor's Interest
Recorded: 2017-07-07
Pages: 9
Assignors
MASNAGHETTI, DOUG K.
Executed: 2016-12-01
SIMMONS, RICHARD R.
Executed: 2017-02-21
YOUNG, SCOTT A.
Executed: 2016-11-30
MCCORD, MARK A.
Executed: 2016-09-30
KNIPPELMEYER, RAINER
Executed: 2016-10-11
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and System for Focus Adjustment of a Multi-Beam Scanning Electron Microscopy System