Patent Assignment
Reel/Frame 042953/0391
Assignment of Assignor's Interest
Recorded: 2017-07-10
Pages: 3
Assignors
TINNEMANS, PATRICIUS ALOYSIUS JACOBUS
Executed: 2016-08-30
LIN, NAN
Executed: 2016-08-22
ROOBOL, SANDER BAS
Executed: 2016-08-08
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2016-08-04
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method