Patent Assignment
Reel/Frame 042987/0632
Assignment of Assignor's Interest
Recorded: 2017-07-12
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Rf Power Distribution in a Multi-Zone Electrode Array