Patent Assignment
Reel/Frame 043004/0949
Assignment of Assignor's Interest
Recorded: 2017-07-14
Pages: 3
Assignors
MASUTOMI, HIROYUKI
Executed: 2017-06-26
SHIOKAWA, TOSHIYUKI
Executed: 2017-06-26
TANAKA, KOJI
Executed: 2017-06-23
SATOH, TAKAMI
Executed: 2017-06-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method, and Storage Medium