Patent Assignment
Reel/Frame 043009/0872
Assignment of Assignor's Interest
Recorded: 2017-07-14
Pages: 4
Assignors
BRIGGS, BENJAMIN D.
Executed: 2016-03-21
CLEVENGER, LAWRENCE A.
Executed: 2016-03-21
PENNY, CHRISTOPHER J.
Executed: 2016-03-21
RIZZOLO, MICHAEL
Executed: 2016-03-21
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Method of Manufacturing Self-Aligned Interconnects by Deposition of a Non-Conformal Air-Gap Forming Layer having an Undulated Upper Surface