Patent Assignment
Reel/Frame 043011/0732
Assignment of Assignor's Interest
Recorded: 2017-07-14
Pages: 4
Assignors
KAL, SUBHADEEP
Executed: 2017-03-16
TAPILY, KANDABARA N.
Executed: 2017-03-16
MOSDEN, AELAN
Executed: 2017-04-18
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Isotropic Silicon and Silicon-Germanium Etching with Tunable Selectivity