Patent Assignment
Reel/Frame 043011/0934
Assignment of Assignor's Interest
Recorded: 2017-07-14
Pages: 3
Assignors
ISHIKAWA, DAI
Executed: 2017-07-12
FUKAZAWA, ATSUKI
Executed: 2017-07-12
WATARAI, TOSHIHARU
Executed: 2017-07-14
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Forming Spacers Using Silicon Nitride Film for Spacer-Defined Multiple Patterning