Patent Assignment
Reel/Frame 043063/0140
Assignment of Assignor's Interest
Recorded: 2017-07-21
Pages: 5
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Target, Substrate, Metrology Apparatus, and Lithographic Apparatus