Patent Assignment
Reel/Frame 043082/0230
Assignment of Assignor's Interest
Recorded: 2017-07-24
Pages: 8
Assignors
NAKATANI, KIMIHIKO
Executed: 2017-07-20
ASHIHARA, HIROSHI
Executed: 2017-07-20
KARASAWA, HAJIME
Executed: 2017-07-20
HARADA, KAZUHIRO
Executed: 2017-07-20
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.