Patent Assignment
Reel/Frame 043083/0328
Assignment of Assignor's Interest
Recorded: 2017-07-24
Pages: 7
Assignors
YATSUDA, KOICHI
Executed: 2017-07-07
HAYAKAWA, TAKASHI
Executed: 2017-07-07
OKUNO, HIROSHI
Executed: 2017-07-07
NIINO, REIJI
Executed: 2017-07-11
HASHIMOTO, HIROYUKI
Executed: 2017-07-18
YAMAGUCHI, TATSUYA
Executed: 2017-07-11
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Fabricating Semiconductor Device, Vacuum Processing Apparatus and Substrate Processing Apparatus