Patent Assignment
Reel/Frame 043133/0641
Assignment of Assignor's Interest
Recorded: 2017-07-28
Pages: 3
Assignors
AGARWAL, PULKIT
Executed: 2017-07-19
KUMAR, PURUSHOTTAM
Executed: 2017-07-28
LAVOIE, ADRIEN
Executed: 2017-07-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Clean for Removal of Photoresist Patterning Scum