Patent Assignment
Reel/Frame 043155/0564
Assignment of Assignor's Interest
Recorded: 2017-08-01
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Aperture for Inspecting Multi Beam, Beam Inspection Apparatus for Multi Beam, and Multi Charged Particle Beam Writing Apparatus