Patent Assignment
Reel/Frame 043173/0509
Assignment of Assignor's Interest
Recorded: 2017-08-02
Pages: 7
Assignors
FUJINO, TOSHIKI
Executed: 2017-07-19
UMEKAWA, ATSUSHI
Executed: 2017-07-19
NAKADA, TAKAYUKI
Executed: 2017-07-19
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Recording Medium, and Fluid Circulation Mechanism
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.