Patent Assignment
Reel/Frame 043230/0732
Assignment of Assignor's Interest
Recorded: 2017-08-08
Pages: 6
Assignors
FUKUDA, MASAHIRO
Executed: 2017-07-28
ICHINOMIYA, HIROSHI
Executed: 2017-07-28
OBATA, KOICHI
Executed: 2017-08-01
YAMAMOTO, TARO
Executed: 2017-07-28
TANAKA, KOUICHIROU
Executed: 2017-07-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus and Liquid Processing Method