Patent Assignment
Reel/Frame 043247/0911
Assignment of Assignor's Interest
Recorded: 2017-08-09
Pages: 6
Assignors
YAMAGUCHI, TAKATOMO
Executed: 2017-07-24
SASAKI, TAKAFUMI
Executed: 2017-07-24
KURIBAYASHI, KOEI
Executed: 2017-07-24
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Cleaning Method, Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.