Patent Assignment
Reel/Frame 043278/0805
Assignment of Assignor's Interest
Recorded: 2017-08-14
Pages: 8
Assignors
RAJ, DAEMIAN
Executed: 2017-04-25
MA, YING
Executed: 2017-08-02
LI, DONGQING
Executed: 2017-05-09
PINSON, JAY D., II
Executed: 2017-05-08
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method & Apparatus to Prevent Deposition Rate/Thickness Drift, Reduce Particle Defects & Increase Remote Plasma System Lifetime