Assignment of Assignor's Interest

Recorded: 2017-08-22 Pages: 10

Assignors

KURE, SEIICHI

Executed: 2017-08-01

NAITOU, RYOUICHIROU

Executed: 2017-07-28

SHITE, HIDEO

Executed: 2017-07-28

Assignee

TOKYO ELECTRON LIMITED

AKAKSAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Substrate Processing Method, and Recording Medium

Application: 15/681,494 →

Publication: US 2018/0061690